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Influence of annealing on the physical properties and atomic structure of a-Si: H films

✍ Scribed by D. Wang; Y. Li; H. Wei; C. Tang; H. Yan; S. Huang


Book ID
119444252
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
280 KB
Volume
95-96
Category
Article
ISSN
0022-3093

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