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Influence of annealing during growth on defect formation in Czochralski silicon

✍ Scribed by Hideo Nakanishi; Hiroki Kohda; Keigo Hoshikawa

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 441 KB
Volume: 61
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(83)90282-8

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