✦ LIBER ✦
Influence of melt-temperature fluctuations on striation formation in large-scale Czochralski Si growth systems
✍ Scribed by Tadashi Kanda; Masataka Hourai; Shinichiro Miki; Tatsuhiko Shigematsu; Hajime Tomokage; Takaya Miyano; Hiroshi Morita; Akira Shintani
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 433 KB
- Volume
- 166
- Category
- Article
- ISSN
- 0022-0248
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