✦ LIBER ✦

Influence of angular distribution of particle incidence on properties of sputtered TiN films

✍ Scribed by A. Neidhardt; U. Reinhold; E. Schroeter; W. Wuttke

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Angular distributions of sputtered parti

✍ I Neshev; V Hamishkeev; VS Chernysh; S Postnikov; B Mamaev 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 314 KB

The influence of surface topographic fea

✍ Wang Zhenxia; Pan Jisheng; Zhang Jiping; Tao Zhenlan; Wang Wenmin; Zhang Huiming 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 424 KB

Some properties of reactively sputtered

✍ A. Czapla; J. Szczyrbowski; M. Jachimowski; H. Boudriot; B. Kubier 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 410 KB

Influence of substrate shape on TiN film

✍ B.O. Johansson; J.-E. Sundgren; H.T.G. Hentzell; S.-E. Karlsson 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 623 KB

Investigation of composition uniformity

✍ Toshinari Yamazaki; Nagayasu Ikeda; Hiroyuki Tawara; Minoru Sato 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 380 KB

Influence of deposition rate on properti

✍ J Musil; V Poulek; J Vyskočil; S Kadlec; V Valvoda; R Kužel Jr; R Černý 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 239 KB