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Influence of substrate shape on TiN films prepared by reactive sputtering

✍ Scribed by B.O. Johansson; J.-E. Sundgren; H.T.G. Hentzell; S.-E. Karlsson


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
623 KB
Volume
111
Category
Article
ISSN
0040-6090

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