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The influence of surface topographic features on angular distribution of sputtered atoms

โœ Scribed by Wang Zhenxia; Pan Jisheng; Zhang Jiping; Tao Zhenlan; Wang Wenmin; Zhang Huiming; Zeng Yuewu


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
424 KB
Volume
46
Category
Article
ISSN
0042-207X

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