Influence of Al Contents on the Microstructure, Mechanical, and Wear properties of Magnetron Sputtered CrAlN Coatings
β Scribed by Hetal N. Shah, R. Jayaganthan
- Book ID
- 118816505
- Publisher
- Springer US
- Year
- 2012
- Tongue
- English
- Weight
- 744 KB
- Volume
- 21
- Category
- Article
- ISSN
- 1059-9495
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Motivated by the success of transition metal nanocomposite hard coatings, a new optically transparent coating based on the Al-Si-N ternary system was developed. Al-Si-N thin films were deposited by reactive DC magnetron co-sputtering of Al and Si targets in an Ar/N 2 atmosphere at 200 Β°C and 500 Β°C
Mo-Al-Si-N films were deposited by reactive magnetron sputtering on substrates of Si wafer, alumina, and stainless steel from composite targets consisting of Mo, Al and Si. To investigate the effect of Al content on the properties of the Mo-Al-Si-N films at a constant Si content of 9 at.%, the chemi