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Inert gas effects on the deposition rate of TiO2 during reactive HiPIMS

✍ Scribed by Bowes, Michael; Bradley, James W.

Book ID: 125438467
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 612 KB
Volume: 250
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2014.02.009

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