𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Induced crystallization of amorphous silicon film in contact with aluminium

✍ Scribed by Wei Cai; Derui Wan


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
315 KB
Volume
219
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Crystallization of sputtered amorphous s
✍ Yong Zhao; Jian Wang; Qiang Hu; Dejie Li πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 894 KB

Silver-copper alloy-induced crystallization of sputtered a-Si has been studied. In this alloy, Cu acts as a catalyst to accelerate the crystallization, while Ag acts as a new kind of buffer layer, different from Al 2 O 3 and Si 3 N 4 , to obtain well-crystallized poly-Si films with short annealing t