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Incorporation of dopants into epitaxial CVD-Silicon layers and incorporation equilibrium

✍ Scribed by H. Kühne

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Equilibrium dopant incorporation in CVD

✍ Dr. H. Kühne; Th. Morgenstern 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 416 KB

Kinetics of the Incorporation of Dopants

✍ Dipl.-Chem. H. Kühne 📂 Article 📅 1982 🏛 John Wiley and Sons 🌐 English ⚖ 413 KB

Activity coefficient and incorporation o

✍ Dr. H. Kühne 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 499 KB

Dopant incorporation kinetics and abrupt

✍ J.-E. Sundgren; J. Knall; W.-X. Ni; M.-A. Hasan; L.C. Markert; J.E. Greene 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 808 KB

Incorporation of dopants and native defe

✍ H.R. Vydyanath 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 577 KB

On the adsorption- and equilibrium-refer

✍ Dipl.-Chem. H. Kühne 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 413 KB 👁 1 views