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In0.53Ga0.47As(1 0 0) native oxide removal by liquid and gas phase HF/H2O chemistries

โœ Scribed by F.L. Lie; W. Rachmady; A.J. Muscat

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
404 KB
Volume
87
Category
Article
ISSN
0167-9317

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