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In situgrowing and etching of carbon nanotubes on silicon under microwave plasma

✍ Scribed by S. H. Tsai; C. T. Shiu; S. H. Lai; L. H. Chan; W. J. Hsieh; H. C. Shih


Book ID
110401002
Publisher
Springer
Year
2002
Tongue
English
Weight
373 KB
Volume
21
Category
Article
ISSN
0261-8028

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