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In situFTIR diagnostics of the radio-frequency plasma decomposition of N2O

✍ Scribed by T. A. Cleland; D. W. Hess

Book ID
105044417
Publisher
Springer
Year
1987
Tongue
English
Weight
920 KB
Volume
7
Category
Article
ISSN
0272-4324

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## Abstract The structure of radio‐frequency (rf) discharges in N~2~ is examined for the electrons and positive ions, in which electron–neutral collisions and ion–neutral collisions are taken into consideration. Some detailed properties of rf plasmas sustained by an rf source voltage of 13.56 MHz a