✦ LIBER ✦
Diagnostics and decomposition mechanism in radio-frequency discharges of fluorocarbons utilized for plasma etching or polymerization
✍ Scribed by R. d'Agostino; F. Cramarossa; S. Benedictis
- Publisher
- Springer
- Year
- 1982
- Tongue
- English
- Weight
- 748 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0272-4324
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