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In situ UV-visible and Infrared ellipsometry study of the influence of silane dilution on the growth of hydrogenated amorphous silicon

✍ Scribed by H Shirai; B Drévillon; N Layadi; P Roca i Cabarrocas


Book ID
117980506
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
286 KB
Volume
164-166
Category
Article
ISSN
0022-3093

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