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In situ study of ion beam induced Si crystallization from a silicide interface

✍ Scribed by F. Fortuna; M.-O. Ruault; H. Bernas; H. Gu; C. Colliex


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
437 KB
Volume
73
Category
Article
ISSN
0169-4332

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