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In situ reactive cleaning of X-ray optics by glow discharge

✍ Scribed by Erik D. Johnson; Richard F. Garrett


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
456 KB
Volume
266
Category
Article
ISSN
0168-9002

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A comparative study of two techniques to depth proÐle multilayer Ni-Fe alloy coatings has been performed. Both conventional cross-sectioning with energy-dispersive x-ray imaging (EDX) and glow discharge optical emission spectroscopy (GDOES) sputter depth proÐling methods have been compared in terms