✦ LIBER ✦

In Situ Quartz Crystal Microbalance and Quadrupole Mass Spectrometry Studies of Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum and Water

✍ Scribed by Rahtu, Antti; Alaranta, Teemu; Ritala, Mikko

No coin nor oath required. For personal study only.

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