✦ LIBER ✦

In-situ polishing pad flatness control

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Improvement of Edge Surface Flatness by

✍ Urara Satake; Toshiyuki Enomoto; Kousuke Matsuda 📂 Article 📅 2012 🏛 Elsevier 🌐 English ⚖ 455 KB

A newly developed polishing pad for achi

✍ T. Enomoto; U. Satake; T. Miyake; N. Tabata 📂 Article 📅 2011 🏛 International Academy for Production Engineering 🌐 English ⚖ 405 KB

Evaluation of Polishing Pad Property by

✍ Satake, Urara; Enomoto, Toshiyuki 📂 Article 📅 2014 🏛 Elsevier 🌐 English ⚖ 441 KB

Scratching by pad asperities in chemical

✍ N. Saka; T. Eusner; J.-H. Chun 📂 Article 📅 2010 🏛 International Academy for Production Engineering 🌐 English ⚖ 681 KB

Characteristics in chemical-mechanical p

✍ Z. Stavreva; D. Zeidler; M. Plötner; K. Drescher 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 702 KB

Photoelectric equipment for controlling

✍ G. M. Gorodinskii; V. N. Galkina 📂 Article 📅 1963 🏛 Springer US 🌐 English ⚖ 515 KB