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In situ oxidation of a thin layer of Ge on Si(001): Observation of GeO to SiO2 transition

✍ Scribed by Prabhakaran, K.; Nishioka, T.; Sumitomo, K.; Kobayashi, Y.; Ogino, T.


Book ID
119963497
Publisher
American Institute of Physics
Year
1993
Tongue
English
Weight
597 KB
Volume
62
Category
Article
ISSN
0003-6951

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