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In situ optical monitoring of OMVPE deposition of AlGaAs by laser reflectance

โœ Scribed by H. Sankur; W. Southwell; R. Hall

Book ID
112975547
Publisher
Springer US
Year
1991
Tongue
English
Weight
497 KB
Volume
20
Category
Article
ISSN
0361-5235

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## Real-time monitoring of the growth of AIGaAs layers by dynamic optical reflect,v,ty (DOR) A simple optical in-situ method of characterizing the growth of AIGaAs layers is presented. The AIGaAs layers are grown by chemical beam epitaxy (CBE). The sensitivity and versatility of the dynamic optica