Interpretation of Absolute Laser Reflectance During Optical Monitoring of Polycrystalline GaAs Deposition on Quartz Using Metalorganic Chemical Vapor Deposition

✍ Scribed by Andrew J. Clayton; Stuart J. C. Irvine

• Book ID: 107457196
• Publisher: Springer US
• Year: 2011
• Tongue: English
• Weight: 425 KB
• Volume: 40
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-011-1540-1