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In-situ observations of growths of Si and Ge on metal-adsorbed Si(111) surfaces by REM-RHEED

✍ Scribed by Hiroki Minoda; Katsumichi Yagi


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
814 KB
Volume
163
Category
Article
ISSN
0022-0248

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Etching processing of Si(111) and Si(100
✍ Masanori Nakamura; Moon-Bong Song; Masatoki Ito πŸ“‚ Article πŸ“… 1996 πŸ› Elsevier Science 🌐 English βš– 512 KB

situ real-time measurements of etching processes by infrared total reflection spectroscopy were carried out for the first time on Si(ll1) and Si(100) surfaces in ammonium fluoride solution. The absorption bands became broad by the interaction between terminal hydrides with water molecules. On Si(lll