In situ RHEED and AFM investigation of growth front morphology evolution of Si(001) grown by UHV-CVD

✍ Scribed by S. Nayak; D.E. Savage; H.-N. Chu; M.G. Lagally; T.F. Kuech

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 269 KB
• Volume: 157
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(95)00383-5