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In-situ measurements during the growth of a-Si:H on c-Si substrates

✍ Scribed by C. Swiatkowski; M. Kunst

Book ID: 115988988
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 245 KB
Volume: 164-166
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(93)90536-7

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