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In situ measurement of stresses in diamond-like carbon films

โœ Scribed by Delplancke-Ogletree, Marie-Paule; Monteiro, Othon R.


Book ID
123241561
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
234 KB
Volume
12
Category
Article
ISSN
0925-9635

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Diamond-like Carbon (DLC) coatings have recently proven to be suitable for a number of tribological applications. Hardness of the DCL coating is very important for such application. An in-situ, non-destructive technique to measure the film hardness would be crucial for process control and quality co