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Measurement of internal stresses in CVD diamond films

✍ Scribed by Y Nakamura; S Sakagami; Y Amamoto; Y Watanabe

Book ID: 114086177
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 560 KB
Volume: 308-309
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00383-0

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