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In situ measurement of stress generation arising from dislocation inclination in Al[sub x]Ga[sub 1−x]N:Si thin films

✍ Scribed by Acord, Jeremy D.; Manning, Ian C.; Weng, Xiaojun; Snyder, David W.; Redwing, Joan M.


Book ID
120887814
Publisher
American Institute of Physics
Year
2008
Tongue
English
Weight
411 KB
Volume
93
Category
Article
ISSN
0003-6951

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