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Tensile stress generation and dislocation reduction in Si-doped Al[sub x]Ga[sub 1âx]N films

✍ Scribed by Manning, I. C.; Weng, X.; Acord, J. D.; Fanton, M. A.; Snyder, D. W.; Redwing, J. M.

Book ID: 121411439
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 813 KB
Volume: 106
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3160331

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