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In-situ infrared characterization of the electrochemical dissolution of silicon in a fluoride electrolyte

✍ Scribed by F. Ozanam; J.-N. Chazalviel

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
807 KB
Volume
64-65
Category
Article
ISSN
0368-2048

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Abstrac-The mechanisms involved in the (photo)dissolution of silicon in fluoride solutions are d&ussed. Several methods, including intensity modulated photocurren t spectrosc4qy, in situ ir spectroscopy, rotating ring disc voltammetry and ellipsometry, have been used to examine the anodic dissolutio

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Altatract-During the anodic dissolution of silicon in fluoride electrolytes, for a given potential E 3 3v,,, any variation of the electrode potential (even very small) makes the current undergo damped oscillations. Correspondingly, the admittance of the interface exhibits resonances at the same freq