Electrochemical and optical studies of silicon dissolution in ammonium fluoride solutions

✍ Scribed by D.J. Blackwood; A. Borazio; R. Greef; L.M. Peter; J. Stumper

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 870 KB
• Volume: 37
• Category: Article
• ISSN: 0013-4686
• DOI: 10.1016/0013-4686(92)85040-r

✦ Synopsis

Abstrac-The mechanisms involved in the (photo)dissolution of silicon in fluoride solutions are d&ussed. Several methods, including intensity modulated photocurren t spectrosc4qy, in situ ir spectroscopy, rotating ring disc voltammetry and ellipsometry, have been used to examine the anodic dissolution process. The valence state of the dissolving silicon has been determined under ditferent conditions, and the optical properties of the surface have also been characterized. The generation of hydrogen has been linked in tlte case of n-Si to intensity dependent photocurrent multiplication, and in the case of p-Si it has been related to different etching regimes. The current oscillations observed during the anodic dissolution of psi are also discussed.