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In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces

✍ Scribed by Vanhellemont, J. ;Claeys, C. ;Van Landuyt, J.


Publisher
John Wiley and Sons
Year
1995
Tongue
English
Weight
629 KB
Volume
150
Category
Article
ISSN
0031-8965

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