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In Situ High Temperature Electrical Characterization of RF Sputtered SiCBN Thin Films

✍ Scribed by Vijayakumar, A.; Todi, R. M.; Todi, V. O.; Sundaram, K. B.

Book ID: 121375772
Publisher: The Electrochemical Society
Year: 2007
Tongue: English
Weight: 174 KB
Volume: 154
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2768193

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