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High-temperature-annealing effects on the electrical properties of RF sputtered SnO2 thin films for microelectronic sensors

✍ Scribed by SK Andreev; LI Popova; VK Gueorguiev; EB Manolov

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
427 KB
Volume
47
Category
Article
ISSN
0042-207X

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