In situ ESR observation of interface dangling bond formation processes during amorphous SiO2 growth on Si

✍ Scribed by W Futako; T Umeda; M Nishizawa; T Yasuda; J Isoya; S Yamasaki

• Book ID: 117145431
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 128 KB
• Volume: 299-302
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(01)00964-4