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In situ ellipsometric study of the three-stage process in CuInSe 2 film deposition

โœ Scribed by Shirakata, Sho; Takahashi, Toshihiro; Matsunaga, Hiroaki

Book ID
121230984
Publisher
John Wiley and Sons
Year
2013
Tongue
English
Weight
507 KB
Volume
10
Category
Article
ISSN
1862-6351

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The reaction kinetics for the formation of CuInSe 2 ยฎlms by reacting Cu/In layers with elemental selenium are compared with those for H 2 Se. The species mole fractions as a function of time in a single Se-source physical vapor deposition (PVD) reactor are found to be essentially the same as those o