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In situ ellipsometric control of Si1−xGexSi heterostructures grown by chemical beam epitaxy

✍ Scribed by P. Boucaud; F. Glowacki; F. Ferrieu; A. Larré; A. Perio; D. Bensahel

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 545 KB
Volume: 248
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)90201-1

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