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In-situ deposition of superconducting YBCO films on Si with ceramic buffer layers

✍ Scribed by J.Y. Juang; K.H. Wu; T.C. Lai; M.H. Lee; M.C. Hseih; T.M. Uen; Y.S. Gou

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
987 KB
Volume
1
Category
Article
ISSN
0964-1807

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CeO 2 layers have been fabricated by pulsed laser deposition (PLD) technique on (1 1 0 2) sapphire substrate. Microstructure of CeO 2 layers is characterized by X-ray diffraction as functions of substrate temperature. The effects of the substrate temperature on the residual stress have been studied.