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In-situ deposition of superconducting YBCO thin films by magnetron sputtering from powder target

โœ Scribed by W. G. Luo; A. L. Ding; K. S. Chan; G. G. Shi; A. Cheng; E. C. M. Young

Publisher
Springer
Year
1992
Tongue
English
Weight
443 KB
Volume
5
Category
Article
ISSN
0896-1107

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In situ thin films of YBa2Cu3O7 prepared
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โœ J.-M. Triscone; M.G. Karkut; O. Brunner; L. Antognazza; M. Decroux; ร˜. Fischer ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 347 KB

We have prepared in situ thin films of YBa2fu307 by single target dc reactive magnetron sputtering. By a delicate adjustment of the oxygen partial pressure as well as the total sputtering pressure, we can grow stoichiometric films using a stoichiometric target. This method gives highly reproducible