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Nb-doped SrTiO3 buffer layers on LaAlO3 substrates by metalorganic deposition for YBCO superconducting films

✍ Scribed by Erdal Celik; Yutaka Yamada; Izumi Hirabayashi; Yuh Shiohara


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
613 KB
Volume
110
Category
Article
ISSN
0921-5107

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Characterization of Nb-doped Pb(Zr,Ti)O3
✍ Takamichi Fujii; Yoshikazu Hishinuma; Tsuyoshi Mita; Takayuki Naono πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 583 KB

Piezoelectric Nb-doped Pb(Zr,Ti)O 3 thin films (PNZT) were deposited on stainless steel and silicon wafer substrates using RF-magnetron sputtering with the aim of micro-electromechanical systems (MEMS) applications. The obtained films on both kinds of substrates were strongly uniaxially oriented, fo