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In situ characterization of phase formation during high-energy oxygen ion implantation in molybdenum

✍ Scribed by Y. Bohne; N. Shevchenko; F. Prokert; J. von Borany; B. Rauschenbach; W. Möller

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
807 KB
Volume
240
Category
Article
ISSN
0168-583X

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We report on the optical planar waveguide formation and modal characterization in Nd:LuVO 4 crystals by triple-energy O 3+ -ion implantation at energies of 2.4, 3.0, and 3.6 MeV and doses of 1.4, 1.4, and 3.1 Â 10 14 ions/cm 2 , respectively. The prism-coupling method is used to investigate the dark