✦ LIBER ✦

In-line statistical process control and feedback for VLSI integrated circuit manufacturing

✍ Scribed by Scher, G.; Eaton, D.H.; Fernelius, B.R.; Sorensen, J.; Akers, J.W.

Book ID: 117872745
Publisher: IEEE
Year: 1990
Tongue: English
Weight: 603 KB
Volume: 13
Category: Article
ISSN: 0148-6411
DOI: 10.1109/33.58849

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

In-line statistical process control and

In-line statistical process control and feedback for VLSI integrated circuit manufacturing : Gary Scher, Dennis H. Eaton, Barry R. Fernelius, James Sorensen and Jerry W. Akers. IEEE Trans. Compon. Hybrids mfg Technol.13(3), 484 (1990)

📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 260 KB

Predicting gate oxide reliability from s

Predicting gate oxide reliability from statistical process control nodes in integrated circuit manufacturing — a case study

✍ James G. Prendergast; Eamonn Murphy; Malcom Stephenson 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 118 KB 👁 2 views

This paper investigates the possibility of transferring the concepts developed for SPC into reliability control of integrated circuits. It employs Taguchi methods and response surface methodology to predict the reliability of a 20 nm gate oxide process using selected critical in line parameters. A T

[IEEE 15th IEEE/CHMT International Elect

[IEEE 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium - Santa Clara, CA, USA (4-6 Oct. 1993)] Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium - Statistical process control and the drive for six sigma in a VLSI pilot line

✍ Nixon, P.; Conway, J.; Maimon, J. 📂 Article 📅 1993 🏛 IEEE ⚖ 511 KB

[Lecture Notes in Computer Science] Meth

[Lecture Notes in Computer Science] Methods and Tools for Computer Integrated Manufacturing Volume 168 || Systems for computer aided process planning including quality control

✍ Rembold, U.; Dillmann, R. 📂 Article 📅 1984 🏛 Springer-Verlag ⚖ 713 KB

Yield model for in-line integrated circu

Yield model for in-line integrated circuit production control : S. Simitrijev, N. Stojadinovic and Z. Stamenkovic. Solid-St. Electron.31, 975 (1988)

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 128 KB

SPIE Proceedings [SPIE Microelectronic M

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV - Chemical rate model for the surface pyrolysis of tetrakis(dimethylamido)titanium to form titanium nitride films

✍ Toprac, Anthony J.; Iacoponi, John A.; Littau, Karl A.; Toprac, Anthony J.; Dang 📂 Article 📅 1998 🏛 SPIE ⚖ 243 KB