✦ LIBER ✦
SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV - Chemical rate model for the surface pyrolysis of tetrakis(dimethylamido)titanium to form titanium nitride films
✍ Scribed by Toprac, Anthony J.; Iacoponi, John A.; Littau, Karl A.; Toprac, Anthony J.; Dang, Kim
- Book ID
- 120459609
- Publisher
- SPIE
- Year
- 1998
- Weight
- 243 KB
- Volume
- 3507
- Category
- Article
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