In-depth profiling of hydrogen in oxidic multilayer systems

✍ Scribed by W. Wagner; F. Rauch; C. Ottermann; K. Bange

• Book ID: 104592640
• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 332 KB
• Volume: 16
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740160170

✦ Synopsis

Abstract

The hydrogen concentration profiles of electrochromic multilayer systems produced by evaporation have been determined by means of nuclear reaction analysis. The H content of individual oxidic materials was found to be larger than for single films, especially for SiO~2~. The time‐dependent H uptake under various ambient conditions was investigated. Systems produced by ion plating were also profiled for hydrogen.