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Impurity-Enhanced Intergranular Cavity Formation in Silicon Nitride at High Temperatures

✍ Scribed by Isao Tanaka; Giuseppe Pezzotti; Ken-ichi Matsushita; Yoshinari Miyamoto; Taira Okamoto


Book ID
110825364
Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
1024 KB
Volume
74
Category
Article
ISSN
0002-7820

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Radioactive 57 Mn þ ions ðT 1=2 ¼ 1:5 minÞ of 60 keV energy have been implanted to low fluences into silicon crystals held at temperatures of 470-820 K: Most of the implantation damage is annealed during the 57 Mn lifetime and the 57 Mn atoms are incorporated on substitutional sites. Interstitial Fe