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Improving reactive ion etching selectivity of GaAs/AlGaAs with He plus

✍ Scribed by C.S. Lin; Y.K. Fang; S.F. Chen; C.Y. Lin; M.C. Hsieh; C.C. Wang; H.K. Huang; C.L. Wu; C.S. Chang

No coin nor oath required. For personal study only.

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