✦ LIBER ✦
Selective reactive ion etching of GaAs on AlGaAs using CCl2F2 and He: Alan Seabaugh, J Vac Sci Technol, B6, 1988, 77–81
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 151 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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