Improvements on surface carrier mobility and electrical stability of MOSFETs using HfTaO gate dielectric

✍ Scribed by Xiongfei Yu; Chunxiang Zhu; Mingbin Yu; Dim-Lee Kwong

• Book ID: 114617647
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 504 KB
• Volume: 51
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2004.839114