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Improvement of the quality of GaN epilayer by combining a SiNxinterlayer and changed GaN growth mode

✍ Scribed by Dechao Yang, Hongwei Liang, Yu Qiu…

Book ID: 120681533
Publisher: Springer US
Year: 2013
Tongue: English
Weight: 408 KB
Volume: 24
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-013-1160-z

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