Improvement of plasma etching durability of positive working resist by copolymerization, blending, and crosslinking

✍ Scribed by Nobuo Ueno; Yasunori Doi; Kazuyuki Sugita; Shigeru Sasaki; Shiro Nagata

• Publisher: John Wiley and Sons
• Year: 1987
• Tongue: English
• Weight: 728 KB
• Volume: 34
• Category: Article
• ISSN: 0021-8995
• DOI: 10.1002/app.1987.070340426